|
|
|
|
|
Login | Create account |
|
|
|
|
|
|
|
|
Below is the reference list for this article:
An electrostatic 3-phase linear stepper motor fabricated by vertical trench isolation technology
2009 J. Micromech. Microeng. 19 074001 (7pp) doi: 10.1088/0960-1317/19/7/074001
HyperCite® linking technology enables you to link to abstracts, preprints or full text of referenced articles. Links to full text articles from IOP and other publishers are displayed in bold type (access is subject to subscription status). More information on reference links is available.
| [1] | Trimmer W S N and Gabriel K J 1987 Design considerations for a practical electrostatic micro-motor Sensors Actuators 11 189-206
CrossRef Link | Order from Infotrieve |
| [2] | Fan L-S, Tai Y-C and Muller R S 1988 IC-processed electrostatic micro-motors Tech. Dig. Int. Electron Devices Meeting (IEDM 88) (San Francisco, CA) pp 666-9 |
| [3] | Mehregany M, Nagarkar P, Senturia S D and Lang J H 1990 Operation of microfabricated harmonic and ordinary side-drive motors Proc. IEEE Micro Electro Mechanical Systems Workshop (MEMS 90) (Napa Valley, CA) pp 1-8 |
| [4] | Mehregany M, Bart S F, Tavrow L S, Lang J H, Senturia S D and Schlecht M F 1990 A study of three microfabricated variable-capacitance motors Sensors Actuators A 21 173-9
CrossRef Link | Order from Infotrieve |
| [5] | Mehregany M and Tai Y-C 1991 Surface micromachined mechanisms and micromotors J. Micromech. Microeng. 1 73-85
IOP Article |
| [6] | Kraus Th, Baltzer M and Obermeier E 1997 Design and fabrication of surface micromachined micromotors with large dimensions J. Micromech. Microeng. 7 196-9
IOP Article |
| [7] | Yasseen A A, Smith S W, Merat F L and Mehregany M 1999 Diffraction grating scanners using polysilicon micromotors IEEE J. Sel. Top. Quantum Electron. 5 75-82
CrossRef Link | Order from Infotrieve |
| [8] | Yasseen A A, Mitchell J N, Klemic J F, Smith D A and Mehregany M 1999 A rotary electrostatic micromotor 1 × 8 optical switch IEEE J. Sel. Top. Quantum Electron. 5 26-32
CrossRef Link | Order from Infotrieve |
| [9] | Suzuki K and Tanigawa H 1991 Single crystal silicon rotational micromotors Proc. IEEE Micro Electro Mechanical Systems Workshop (MEMS 91) (Nara, Japan) pp 15-20
CrossRef Link |
| [10] | Matsubara T, Yamaguchi M, Minami K and Esashi M 1993 Stepping electrostatic microactuator Dig. Tech. Papers Int. Conf. on Solid-State Sensors and Actuators (Transducers 93) (Yokohama, Japan) pp 50-3 |
| [11] | Legtenberg R, Groeneveld A W and Elwenspoek M 1996 Comb-drive actuators for large displacements J. Micromech. Microeng. 6 320-9
IOP Article |
| [12] | Brosnihan T J, Bustillo J M, Pisano A P and Howe R T 1997 Embedded interconnect and electrical isolation for high-aspect-ratio, SOI inertial instruments Proc. Int. Conf. on Solid-State Sensors and Actuators (Transducers 97) (Chicago, IL) vol 1 pp 637-40 |
| [13] | Sarajlic E, Berenschot E, Krijnen G and Elwenspoek M 2003 Versatile trench isolation technology for the fabrication of microactuators Microelectron. Eng. 67-68 430-7
CrossRef Link | Order from Infotrieve |
| [14] | Sarajlic E, de Boer M J, Jansen H V, Arnal N, Puech M, Krijnen G and Elwenspoek M 2004 Advanced plasma processing combined with trench isolation technology for fabrication and fast prototyping of high aspect ratio MEMS in standard silicon wafers J. Micromech. Microeng. 14 S70-S75
IOP Article |
| [15] | Vanapalli S 2004 Techniques for characterization of in-plane displacement for microactuators Master's Thesis Department of Electrical Engineering, University of Twente |
| [16] | Yamahata C, Sarajlic E, Jalabert L, Kumemura M, Collard D and Fujita H 2009 Mechanical characterization of biomolecules in liquid using silicon tweezers with subnanonewton resolution Proc. 22nd IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS 2009) (Sorrento, Italy) pp 607-10 |
| [17] | Bertz A, Küchler M, Knöfler R and Gessner T 2002 A novel high aspect ratio technology for MEMS fabrication using standard silicon wafers Sensors Actuators A 97-8 691-701
CrossRef Link | Order from Infotrieve |
| [18] | Grade J D, Jerman H and Kenny T W 2003 Design of large deflection electrostatic actuators J. Microelectromech. Syst. 12 335-43
CrossRef Link | Order from Infotrieve |
|
||
 |
||
|