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An electrostatic 3-phase linear stepper motor fabricated by vertical trench isolation technology
Edin Sarajlic, Christophe Yamahata, Mauricio Cordero and Hiroyuki Fujita 2009 J. Micromech. Microeng. 19 074001 (7pp)   doi: 10.1088/0960-1317/19/7/074001

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Video Video Clip (3.19 MB MOV) Video clip demonstrating the operation of the linear stepper motor.

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