Abstract. Metallic glasses possess unique mechanical properties which make them attractive materials for fabricating components for a variety of applications. For example, the commercial Zr-based metallic glasses possess high tensile strengths (2.0 GPa), good fracture toughnesses (10–50 MPa) and good wear and corrosion resistances. A particularly important characteristic of metallic glasses is their intrinsic homogeneity to the nanoscale because of the absence of grain boundaries. This characteristic, coupled with their unique mechanical properties, makes them ideal materials for fabricating micron-scale components, or high-aspect-ratio micro-patterned surfaces, which may in turn be used as dies for the hot-embossing of polymeric microfluidic devices. In this paper we consider a commercially available Zr-based metallic glass which has a glass transition temperature of T_g 350 °C and describe the thermoplastic forming of a tool made from this material, which has the (negative) microchannel pattern for a simple microfluidic device. This tool was successfully used to produce the microchannel pattern by micro-hot-embossing of the amorphous polymers poly(methyl methacrylate) (T_g 115 °C) and Zeonex-690R (T_g 136 °C) above their glass transition temperatures. The metallic glass tool was found to be very robust, and it was used to produce hundreds of high-fidelity micron-scale embossed patterns without degradation or failure.

Print publication: Issue 11 (November 2009)
Received 21 August 2009, in final form 28 September 2009
Published 19 October 2009