J. Micromech. Microeng. 7 (September 1997) 196-199 doi: 10.1088/0960-1317/7/3/031
Design and fabrication of surface micromachined micromotors with large dimensions
Th Kraus, M Baltzer and E Obermeier
Technical University of Berlin, Sekr. TIB 3.1, Gustav-Meyer-Allee 25, 13355 Berlin, Germany
and
Presented on 21 October 1996, accepted for publication 8 April 1997Abstract.
Micromotors with enlarged 
and 
rotor diameters are described in this paper. A large driving torque was obtained by fabricating up to 234 stator and 156 rotor electrodes. Microbridges were used to connect the stator electrodes to the electrical lines and two different electrode designs were investigated. The most favourable electrode geometry and the driving torque was determined by simulating the force per pole. The surface micromachined micromotors have been fabricated and tested successfully.
Print publication: Issue 3 (September 1997)
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