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Volume 13, Number 3, May 2003

e-mail alerts. An easy way to keep up to date As a service to authors and to the international physics community, all papers published in our journals are made freely available for 30 days from the date of online publication. All papers published in the last 30 days can be found in our This Month's Papers service. Further information, including Conditions of use, is available.

 
PAPERS
353GaAs membrane supported millimeter-wave receiver structures
G Konstantinidis, D Neculoiu, M Lagadas, G Deligeorgis, D Vasilache and A Muller
Abstract  |  References  |  Citing articles Full text:  Acrobat PDF (236 KB)  |  PostScript (281 KB)
 
359Development of polyimide flexible tactile sensor skin
J Engel, J Chen and C Liu
Abstract  |  References  |  Citing articles Full text:  Acrobat PDF (342 KB)  |  PostScript (396 KB)
 
367Tapered LIGA HARMs
R Turner, Y Desta, K Kelly, J Zhang, E Geiger, S Cortez and D C Mancini
Abstract  |  References  |  Citing articles Full text:  Acrobat PDF (396 KB)  |  PostScript (446 KB)
 
373Roughened polysilicon for low impedance microelectrodes in neural probes
S-J Paik, Y Park and D Cho
Abstract  |  References  |  Citing articles Full text:  Acrobat PDF (985 KB)  |  PostScript (866 KB)
 
380Building thick photoresist structures from the bottom up
M C Peterman, P Huie, D M Bloom and H A Fishman
Abstract  |  References  |  Citing articles Full text:  Acrobat PDF (160 KB)  |  PostScript (206 KB)
 
383Magnetically-driven bi-directional optical microscanner
H J Cho and C H Ahn
Abstract  |  References  |  Citing articles Full text:  Acrobat PDF (325 KB)  |  PostScript (373 KB)
 
390Analysis of valveless micropumps with inertial effects
L S Pan, T Y Ng, X H Wu and H P Lee
Abstract  |  References  |  Citing articles Full text:  Acrobat PDF (491 KB)  |  PostScript (491 KB)
 
400Optical and mechanical models for a variable optical attenuator using a micromirror drawbridge
A Q Liu, X M Zhang, C Lu, F Wang, C Lu and Z S Liu
Abstract  |  References  |  Citing articles Full text:  Acrobat PDF (611 KB)  |  PostScript (629 KB)
 
412Microfluidic diffusion diluter: bulging of PDMS microchannels under pressure-driven flow
M A Holden, S Kumar, A Beskok and P S Cremer
Abstract  |  References  |  Citing articles Full text:  Acrobat PDF (408 KB)  |  PostScript (429 KB)
 
419Fabrication of all-polymer freestanding waveguides
R Horvath, L R Lindvold and N B Larsen
Abstract  |  References  |  Citing articles Full text:  Acrobat PDF (794 KB)  |  PostScript (880 KB)
 
425Novel integration of a microchannel with a silicon light emitting diode antifuse
P LeMinh, J Holleman, H Wallinga, J W Berenschot, N R Tas and A van den Berg
Abstract  |  References  |  Citing articles Full text:  Acrobat PDF (238 KB)  |  PostScript (262 KB)
 
430Fabrication of high-aspect-ratio polymer-based electrostatic comb drives using the hot embossing technique
Y Zhao and T Cui
Abstract  |  References  |  Citing articles Full text:  Acrobat PDF (551 KB)  |  PostScript (625 KB)
 
436Fabrication and experimental investigation of silicon micro heat pipes for cooling electronics
M Le Berre, S Launay, V Sartre and M Lallemand
Abstract  |  References  |  Citing articles Full text:  Acrobat PDF (217 KB)  |  PostScript (245 KB)
 
442A novel tank for DI water reduction in MEMS manufacturing
O Raccurt, F Tardif, L Kerber, T Lardin and T Vareine
Abstract  |  References  |  Citing articles Full text:  Acrobat PDF (313 KB)  |  PostScript (344 KB)
 
447Micromachined flow cytometers with embedded etched optic fibers for optical detection
C-H Lin and G-B Lee
Abstract  |  References  |  Citing articles Full text:  Acrobat PDF (390 KB)  |  PostScript (417 KB)
 
454Efficient spatial-temporal chaotic mixing in microchannels
X Niu and Y-K Lee
Abstract  |  References  |  Citing articles Full text:  Acrobat PDF (734 KB)  |  PostScript (824 KB)
 
463Analytical modeling of ultra-thin-film bearings
W K Chan and Y Sun
Abstract  |  References Full text:  Acrobat PDF (330 KB)  |  PostScript (339 KB)
 
474Micromirror array for protein micro array fabrication
K-N Lee, D-S Shin, Y-S Lee and Y-K Kim
Abstract  |  References  |  Citing articles Full text:  Acrobat PDF (573 KB)  |  PostScript (788 KB)
 
482Singular elements for electro-mechanical coupling analysis of micro-devices
E T Ong, K H Lee and K M Lim
Abstract  |  References  |  Citing articles Full text:  Acrobat PDF (240 KB)  |  PostScript (269 KB)
 
491Secondary resonances of electrically actuated resonant microsensors
E M Abdel-Rahman and A H Nayfeh
Abstract  |  References  |  Citing articles Full text:  Acrobat PDF (216 KB)  |  PostScript (212 KB)
 
502Silicon nitride ceramic-based two-dimensional microcombustor
S Tanaka, T Yamada, S Sugimoto, J-F Li and M Esashi
Abstract  |  References  |  Citing articles Full text:  Acrobat PDF (734 KB)  |  PostScript (780 KB)
 
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