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Journal of Micromechanics and Microengineering
All articles published within the last 30 days

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Thermo-curable epoxy systems for nanoimprint lithography
Chun-Chang Wu and Steve Lien-Chung Hsu 2010 J. Micromech. Microeng. 20 015006 (8pp)   doi: 10.1088/0960-1317/20/1/015006
Abstract  |  References Full text:  Acrobat PDF (1.71 MB)
Investigation of residual stress and its effects on the vibrational characteristics of piezoelectric-based multilayered microdiaphragms
M Olfatnia, T Xu, L S Ong, J M Miao and Z H Wang 2010 J. Micromech. Microeng. 20 015007 (8pp)   doi: 10.1088/0960-1317/20/1/015007
Abstract  |  References Full text:  Acrobat PDF (1.11 MB)
Platinum microheater integrated silicon optical bench assembly for endoscopic optical coherence tomography
Y Xu, M F Wang, C S Premachandran, K W S Chen, N Chen and M Olivo 2010 J. Micromech. Microeng. 20 015008 (8pp)   doi: 10.1088/0960-1317/20/1/015008
Abstract  |  References Full text:  Acrobat PDF (1.86 MB)
Thermoplastic microcantilevers fabricated by nanoimprint lithography
Anders Greve, Stephan Keller, Asger L Vig, Anders Kristensen, David Larsson, Kresten Yvind, Jørn M Hvam, Marta Cerruti, Arunava Majumdar and Anja Boisen 2010 J. Micromech. Microeng. 20 015009 (5pp)   doi: 10.1088/0960-1317/20/1/015009
Abstract  |  References Full text:  Acrobat PDF (516 KB)
Development of a flexure-based, force-sensing microgripper for micro-object manipulation
Kaushik Jayaram and Suhas S Joshi 2010 J. Micromech. Microeng. 20 015001 (10pp)   doi: 10.1088/0960-1317/20/1/015001
Abstract  |  References Full text:  Acrobat PDF (1.71 MB)
The fabrication of all-silicon micro gas chromatography columns using gold diffusion eutectic bonding
A D Radadia, A Salehi-Khojin, R I Masel and M A Shannon 2010 J. Micromech. Microeng. 20 015002 (7pp)   doi: 10.1088/0960-1317/20/1/015002
Abstract  |  References Full text:  Acrobat PDF (685 KB)
Tunable photonic crystals on a freestanding polymer membrane
Yongjin Wang, Wolfgang Mönch, Bernd Aatz and Hans Zappe 2010 J. Micromech. Microeng. 20 015003 (6pp)   doi: 10.1088/0960-1317/20/1/015003
Abstract  |  References Full text:  Acrobat PDF (843 KB)
A surface micromachined offset-drive method to extend the electrostatic travel range
J Su, H Yang, P Fay, W Porod and G H Bernstein 2010 J. Micromech. Microeng. 20 015004 (10pp)   doi: 10.1088/0960-1317/20/1/015004
Abstract  |  References Full text:  Acrobat PDF (1.88 MB)
A novel single-use SU-8 microvalve for pressure-driven microfluidic applications
J Miguel Moreno and José M Quero 2010 J. Micromech. Microeng. 20 015005 (11pp)   doi: 10.1088/0960-1317/20/1/015005
Abstract  |  References Full text:  Acrobat PDF (3.10 MB)
Femtosecond laser micromachining of silicon with an external electric field
H Y Zheng and Z W Jiang 2010 J. Micromech. Microeng. 20 017001 (4pp)   doi: 10.1088/0960-1317/20/1/017001
Abstract  |  References Full text:  Acrobat PDF (686 KB)
Resist evaluation for fabrication of diffractive optical elements (DOEs) with sub-micron resolution in a MEMS production line
Aina Herbjørnrød, Kari Schjølberg-Henriksen, Hallvard Angelskår and Matthieu Lacolle 2009 J. Micromech. Microeng. 19 125022 (9pp)   doi: 10.1088/0960-1317/19/12/125022
Abstract  |  References Full text:  Acrobat PDF (1.37 MB)
A low-temperature polycrystalline-silicon thin-film transistor micro-manipulation array with indium tin oxide micro-coils and real-time detection
Chih-Yang Chen, Chien-Yu Huang, Chrong-Jung Lin and Ya-Chin King 2009 J. Micromech. Microeng. 19 125023 (5pp)   doi: 10.1088/0960-1317/19/12/125023
Abstract  |  References Full text:  Acrobat PDF (964 KB)
Evaluation of the waterproof ability of a hydrophobic nickel micromesh with array-type microholes
Sang Min Lee, Dong Joon Oh, Im Deok Jung, Phill Gu Jung, Kwang Hyo Chung, Won Ick Jang and Jong Soo Ko 2009 J. Micromech. Microeng. 19 125024 (8pp)   doi: 10.1088/0960-1317/19/12/125024
Abstract  |  References Full text:  Acrobat PDF (1.59 MB)
Passive micro-assembly of modular, hot embossed, polymer microfluidic devices using exact constraint design
Byoung Hee You, Pin-Chuan Chen, Daniel S Park, Sunggook Park, Dimitris E Nikitopoulos, Steven A Soper and Michael C Murphy 2009 J. Micromech. Microeng. 19 125025 (11pp)   doi: 10.1088/0960-1317/19/12/125025
Abstract  |  References Full text:  Acrobat PDF (1.31 MB)
Frequency and amplitude dependences of molding accuracy in ultrasonic nanoimprint technology
Harutaka Mekaru and Masaharu Takahashi 2009 J. Micromech. Microeng. 19 125026 (11pp)   doi: 10.1088/0960-1317/19/12/125026
Abstract  |  References Full text:  Acrobat PDF (1.08 MB)
Simultaneous determination of the Young's modulus and Poisson's ratio in micro/nano materials
Lijie Li, Joao Gomes, Gordon Brown, Deepak Uttamchandani, Wenke Pan, Dominik Weiland, Mark Begbie, Craig Lowrie and Marc P Y Desmulliez 2009 J. Micromech. Microeng. 19 125027 (9pp)   doi: 10.1088/0960-1317/19/12/125027
Abstract  |  References Full text:  Acrobat PDF (878 KB)
Nano/micro structure fabrication of metal surfaces using the combination of nano plastic forming, coating and roller imprinting processes
W Kurnia and M Yoshino 2009 J. Micromech. Microeng. 19 125028 (11pp)   doi: 10.1088/0960-1317/19/12/125028
Abstract  |  References Full text:  Acrobat PDF (2.50 MB)
Characterization of heavily doped polysilicon films for CMOS-MEMS thermoelectric power generators
Jin Xie, Chengkuo Lee, Ming-Fang Wang, Youhe Liu and Hanhua Feng 2009 J. Micromech. Microeng. 19 125029 (8pp)   doi: 10.1088/0960-1317/19/12/125029
Abstract  |  References Full text:  Acrobat PDF (1.16 MB)
Dielectrophoretic deflection of ink jets
Paul R Chiarot and T B Jones 2009 J. Micromech. Microeng. 19 125018 (8pp)   doi: 10.1088/0960-1317/19/12/125018
Abstract  |  References Full text:  Acrobat PDF (744 KB)
Reflectivity of an etched silicon surface with pyramids: II. Experimental results from different etching conditions
Chen Jian Wu, Pal-Jen Wei and Jen Fin Lin 2009 J. Micromech. Microeng. 19 125019 (6pp)   doi: 10.1088/0960-1317/19/12/125019
Abstract  |  References Full text:  Acrobat PDF (1.19 MB)
Resonance tunability of clamped–free piezoelectric cantilevers
M Wischke, M Masur, F Goldschmidtboeing and P Woias 2009 J. Micromech. Microeng. 19 125020 (8pp)   doi: 10.1088/0960-1317/19/12/125020
Abstract  |  References Full text:  Acrobat PDF (596 KB)
The micro-droplet behavior of a molten lead-free solder in an inkjet printing process
M H Tsai, W S Hwang and H H Chou 2009 J. Micromech. Microeng. 19 125021 (10pp)   doi: 10.1088/0960-1317/19/12/125021
Abstract  |  References Full text:  Acrobat PDF (3.51 MB)
Application of hydrogel-coated microcantilevers as sensing elements for pH
Julian Gonska, Christoph Schelling and Gerald Urban 2009 J. Micromech. Microeng. 19 127002 (8pp)   doi: 10.1088/0960-1317/19/12/127002
Abstract  |  References Full text:  Acrobat PDF (578 KB)
Micro projection lithography using microlens on a mask
Chang-Hyeon Ji, Florian Herrault and Mark G Allen 2009 J. Micromech. Microeng. 19 127003 (6pp)   doi: 10.1088/0960-1317/19/12/127003
Abstract  |  References Full text:  Acrobat PDF (769 KB)
Experimental and numerical analyses of micro rotary shaft pumps
A Rossetti, G Pavesi and G Ardizzon 2009 J. Micromech. Microeng. 19 125013 (12pp)   doi: 10.1088/0960-1317/19/12/125013
Abstract  |  References Full text:  Acrobat PDF (2.31 MB)
High-throughput microparticle separation using gradient traveling wave dielectrophoresis
Eunpyo Choi, Byungkyu Kim and Jungyul Park 2009 J. Micromech. Microeng. 19 125014 (10pp)   doi: 10.1088/0960-1317/19/12/125014
Abstract  |  References Full text:  Acrobat PDF (2 MB)
Transient response and stability of the AGC-PI closed-loop controlled MEMS vibratory gyroscopes
J Cui, X Z Chi, H T Ding, L T Lin, Z C Yang and G Z Yan 2009 J. Micromech. Microeng. 19 125015 (17pp)   doi: 10.1088/0960-1317/19/12/125015
Abstract  |  References Full text:  Acrobat PDF (1.92 MB)
A MEMS-based silicon micropump with intersecting channels and integrated hotwires
Van Thanh Dau, Thien Xuan Dinh and Susumu Sugiyama 2009 J. Micromech. Microeng. 19 125016 (7pp)   doi: 10.1088/0960-1317/19/12/125016
Abstract  |  References Full text:  Acrobat PDF (987 KB)
Fabrication of an eyeball-like spherical micro-lens array using extrusion for optical fiber coupling
S C Shen, C T Pan, K H Liu, C H Chao and J C Huang 2009 J. Micromech. Microeng. 19 125017 (9pp)   doi: 10.1088/0960-1317/19/12/125017
Abstract  |  References Full text:  Acrobat PDF (1.43 MB)
Vibration analysis of a piezoelectric micromachined modal gyroscope (PMMG)
Xiaosheng Wu, Wenyuan Chen, Yipeng Lu, Qijun Xiao, Gaoyin Ma, Weiping Zhang and Feng Cui 2009 J. Micromech. Microeng. 19 125008 (10pp)   doi: 10.1088/0960-1317/19/12/125008
Abstract  |  References Full text:  Acrobat PDF (2.41 MB)
Three-dimensional micro structured nanocomposite beams by microfluidic infiltration
L L Lebel, B Aïssa, O A Paez, M A El Khakani and D Therriault 2009 J. Micromech. Microeng. 19 125009 (7pp)   doi: 10.1088/0960-1317/19/12/125009
Abstract  |  References Full text:  Acrobat PDF (978 KB)
A process of glassy carbon etching without the micro masking effect for the fabrication of a mold with a high-quality surface
Sung-Won Youn, Akihisa Ueno, Masaharu Takahashi and Ryutaro Maeda 2009 J. Micromech. Microeng. 19 125010 (8pp)   doi: 10.1088/0960-1317/19/12/125010
Abstract  |  References Full text:  Acrobat PDF (2.14 MB)
Orientation- and concentration-dependent surfactant adsorption on silicon in aqueous alkaline solutions: explaining the changes in the etch rate, roughness and undercutting for MEMS applications
M A Gosálvez, B Tang, P Pal, K Sato, Y Kimura and K Ishibashi 2009 J. Micromech. Microeng. 19 125011 (18pp)   doi: 10.1088/0960-1317/19/12/125011
Abstract  |  References Full text:  Acrobat PDF (3.36 MB)
A novel symmetrical microwave power sensor based on GaAs monolithic microwave integrated circuit technology
De-bo Wang and Xiao-ping Liao 2009 J. Micromech. Microeng. 19 125012 (8pp)   doi: 10.1088/0960-1317/19/12/125012
Abstract  |  References Full text:  Acrobat PDF (860 KB)
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