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2009 J. Phys.: Conf. Ser. 190 012131 (6pp) doi: 10.1088/1742-6596/190/1/012131
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Abstract. We investigate the microstructure of Ge/Si and GaN/AlN sandwiches containing vertically aligned QDs. The study establishes an influence of blocking layers (Si, AlN) thickness, number of QDs layers (Ge, GaN) in heterostructure and annealing temperature on the microstructure characteristics of systems with quantum dots.
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