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N – K edge NEXAFS study of the defects induced by indium implantation in GaN

M Katsikini et al 2009 J. Phys.: Conf. Ser. 190 012065 (4pp)   doi: 10.1088/1742-6596/190/1/012065  Help

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M Katsikini1, F Pinakidou1, E C Paloura1, E Wendler2, W Wesch2 and R Manzke3
1 Aristotle University of Thessaloniki, School of Physics, Section of Solid State Physics, 54124 Thessaloniki, Greece
2 Institut für Festkörperphysik, Friedrich-Schiller Universität Jena, Max-Wien-Platz 1, 07743 Jena, Germany
3 Humboldt Universität zu Berlin, Institut für Physik, Newtonstraße 15, 12489 Berlin, Germany
E-mail: katsiki@auth.gr

Abstract. N – K edge near edge X-ray absorption fine structure (NEXAFS) spectroscopy is applied in order to determine implantation-induced changes in the electronic structure of GaN. The samples were implanted with 700 keV In ions and fluencies in the range 5×1013 – 1 × 1016 ions/cm2. The NEXAFS results are discussed in combination with Rutherford backscattering (RBS) characterization which assesses the implantation induced damage. The main implantation effects on the NEXAFS spectra are: (a) a fluence-dependent broadening of the NEXAFS peaks, (b) emergence of a pre-edge shoulder (RL1) that is attributed to N split-interstitials and (c) appearance of a post-edge sharp peak (RL2) that is attributed to molecular N2 trapped in the GaN matrix. The RL2 is characterized by fine structure due to vibronic transitions that result from a change of the vibrational quantum number along with the electronic transition. The concentration of the interstitials and the N2 molecules as well as the width of the NEXAFS peaks, have a sigmoidal dependence on the logarithm of the ion fluence, following the behaviour of the defect concentration deduced from the RBS measurements.

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