Abstract. We propose a new method for studying multilayer structure using angle resolved extended x-ray absorption fine structure (EXAFS) measurements. The linear integral equation describing a connection between the fluorescence intensity for spectrum of element C, the incident beam energy E, the incident angle and the concentration profile p(z,C) has been derived. It is a Fredholm integral equation of the first kind, it belongs to the class of ill-posed problems and for solution it needs special methods. We use the regularization method. For determining the depth-dependent partial interatomic distances we use angle resolved EXAFS data. The effectiveness of the method has been tested during numerical simulation on the model crystalline three-layer with BCC structure: Cr/Fe/Cr.