Linearization of a two-axis MEMS scanner driven by vertical comb-drive actuators

doi:10.1088/0960-1317/18/1/015015

Linearization of a two-axis MEMS scanner driven by vertical comb-drive actuators

Jui-che Tsai et al 2008 J. Micromech. Microeng. 18 015015 (8pp) doi: 10.1088/0960-1317/18/1/015015

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Jui-che Tsai¹, Li-Cheng Lu¹, Wei-Chi Hsu¹, Chia-Wei Sun² and Ming C Wu³
¹ Graduate Institute of Photonics and Optoelectronics and Department of Electrical Engineering, National Taiwan University, Taipei 10617, Taiwan
² Medical Electronics and Device Technology Center, Industrial Technology Research Institute, Hsinchu, Taiwan
³ Department of Electrical Engineering and Computer Sciences and Berkeley Sensor and Actuator Center (BSAC), University of California, Berkeley, CA 94720-1774, USA
E-mail: jctsai@cc.ee.ntu.edu.tw

Abstract. A driving scheme using a pair of differential voltages (V_x, V_y) over a bias voltage is proposed to linearize the dc characteristic (angle versus voltage) of a two-axis MEMS scanner. The micromirror has a gimbal-less structure and is driven by vertical comb-drive actuators in conjunction with a leverage mechanism. At an optimal bias voltage of 53 V, a linear optical scan range of ±3.2° is achieved experimentally in both the x and y directions with the differential voltages ranging from −10 V to + 10 V.

Print publication: Issue 1 (January 2008)
Received 2 August 2007, in final form 24 October 2007
Published 3 December 2007

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Linearization of a two-axis MEMS scanner driven by vertical comb-drive actuators

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