Abstract. Here we present a 'circuit edit' concept for superconducting microcircuits that operate at T≤4.2 K making use of superconducting material fabricated using focused ion beam induced deposition (FIBID) with W(CO)₆ as the precursor gas. This material has been recently used to fabricate superconducting nanowires with a critical temperature of 5.2 K. Circuit edit consists of using FIB technology with the possibilities for local patterning with nanometer resolution, to modify or repair highly valuable low- T_C superconducting devices such SQUIDs, Josephson junction array voltage standards, or transition edge sensors.

Print publication: Issue 12 (December 2009)
Received 16 July 2009, in final form 28 September 2009
Published 23 October 2009