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Combined-structure semiconductor gas sensor based on butane gas

Wu Xinghui et al 2001 Semicond. Sci. Technol. 16 682-686   doi: 10.1088/0268-1242/16/8/308  Help

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Wu Xinghui, Wang Yude1,2, Li Yanfeng and Zhou Zhenlai
Department of Materials Science and Engineering, Yunnan University, Kunming, 650091, People's Republic of China
1 Author to whom correspondence should be addressed.
2 Present address: Department of Materials Science and Engineering, Tsinghua University, Beijing, 100084, People's Republic of China.
E-mail: wangyude99@mails.tsinghua.edu.cn

Abstract. A new combined-structure semiconductor gas sensor based on butane gas is reported in this paper. The combined structure sensor is a gas sensor that is based on the complementary feedback principle. The sensor is composed of two sensitive materials A and B whose conductive types are the same. The materials A and B are all n-type materials. The results analysed from a theoretical viewpoint showed that the sensor had higher selectivity and better thermal stability when materials A and B satisfied certain conditions. According to the sensor's structure and meeting conditions, we prepared the combined-structure gas sensor for butane gas. The experimental results showed that they are consistent with theoretical analysis and can be applied to monitor and control leakage of butane gas.

Print publication: Issue 8 (August 2001)
Received 6 April 2001, in final form 16 May 2001
Published 22 June 2001

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