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Applications of a semiconductor backscattered electron detector in a scanning electron microscope

J Stephen et al 1975 J. Phys. E: Sci. Instrum. 8 607-610   doi: 10.1088/0022-3735/8/7/021  Help

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J Stephen, B J Smith, D C Marshall and E M Wittam
Electronics & Appl. Phys. Div., AERE, Harwell, UK

Abstract. Describes a solid state backscattered electron detector that has been developed at Harwell for use in a scanning electron microscope. Applications of the method of detection are discussed and examples of the three principal uses are shown. These are in the display of atomic number variations, examination of crystal quality and in topographical examination of insulating specimens.

Print publication: Issue 7 (July 1975)

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