journals.iop.org home page electronic journals * User guide   * Site map   | Quick Search:Help  
Journal of Physics E: Scientific Instruments
Athens/Institutional login
IOP login: Password:   
Create account | Alerts | Contact us
Journals Home | Journals List | EJs Extra | This Journal | Search | Authors | Referees | Librarians | User Options | Help |

Crystal orientation by cleavage plane reflected laser beam

J E Greene et al 1972 J. Phys. E: Sci. Instrum. 5 975-976   doi: 10.1088/0022-3735/5/10/012  Help

   PDF (274 KB) | References

J E Greene and J M Whelan
Univ. Southern California, Los Angeles, CA, USA

Abstract. An apparatus is described for the orientation and transfer of single crystals which have well-defined cleavage planes. It is based upon the reflection of a 6328 AA He-Ne laser beam from the cleavage planes. Orientation and subsequent transfer of a GaAs crystal to a wafering machine can be done with a cumulative error of less than 0.15 degrees .

Print publication: Issue 10 (October 1972)

Bookmark and Share Post to CiteUlike | Post to Connotea | Post to Bibsonomy

 

Find related articles





Article options

Authors & Referees

This Month's Paperseprintweb.org - Your address for E prints
 
Content finder
  Full Search
  Help


  
Setup information is available for Adobe Acrobat.
EndNote, ProCite ® and Reference Manager ® are registered trademarks of ISI Researchsoft.
Copyright © Institute of Physics and IOP Publishing Limited 2010.
Use of this service is subject to compliance with the Terms and Conditions of use. In particular, reselling and systematic downloading of files is prohibited.
Help: Cookies | Data Protection. Privacy policy Disclaimer