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1994 J. Phys. D: Appl. Phys. 27 296-300 doi: 10.1088/0022-3727/27/2/018
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Abstract. The collective behaviour of weakly ionized RF dusty plasmas is investigated. Negatively charged SiO2 fine particles are generated and suspended in an SiH4/O2/Ar discharge. At high pressure (300 mTorr), the random fluctuations of the discharge and particle motions are suppressed. Coulomb solids with particle diameters from a few micrometres to a millimetre have been observed. At low pressure, the coupling between particles and the background plasma causes large-amplitude low-frequency fluctuations of the dusty plasma.
Print publication: Issue 2 (14 February 1994) |
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