| Date: | Wed, 7 November 2007 |
|---|---|
| Venue: | Institute of Physics, London |
| Organised by: | Ion and Plasma Surface Interactions Group (IPSI) |
First Announcement
This is a meeting addressing the requirements on plasmas, in the etch and deposition of material, applicable to devices/ systems at the micro scale and in the transition to nano scale. The devices/ systems may be used, for example, in semiconductor, automotive, aeronautical, communications, photonics, medical or related industries.
All issues of importance to the use of plasmas or ion beams within the fields of micro and nano technology, fall within the scope of the meeting, including plasma modelling and diagnostic techniques, material processing, processing equipment and control systems. Relevant disciplines are Physics, Electrical and Electronic Engineering and Chemistry, as well as Medicine, Biology, Mathematics and Computing.
The meeting will include both invited and contributed presentations and is aimed to be relevant and useful to users of plasma technology from industry, experienced research workers and students and others looking to increase their participation in the fields of micro and nano technology.
Preliminary Programme
| 09:30 | Registration and Refreshments |
| 10:30 | Invited Presentation 1 |
| 11:20 | Contributed Presentation |
| 11:40 | Contributed Presentation |
| 12:00 | Invited Presentation 2 |
| 12:50 | Lunch - Poster Session - Exhibition |
| 14:00 | Invited Presentation 3 |
| 14:50 | Contributed Presentation |
| 15:10 | Contributed Presentation |
| 15:30 | Coffee and Refreshments - Poster Session - Exhibition |
| 16:00 | Contributed Presentation |
| 16:20 | Contributed Presentation |
| 16:40 | Contributed Presentation |
| 17:00 | Close of Meeting |
Organisers:
Dr. Leslie M. Lea
Surface Technology Systems plc
Imperial Park
Newport
NP10 8UJ
U.K.
Tel: +44(0) 1633 652455 (direct)
Fax: +44(0) 1633 652405
e-mail: leslie.lea@stsystems.co.uk
Dr. Alec Goodyear
The Open University
Department of Materials Engineering
Walton Hall
Milton Keynes
MK7 6AA
U.K.
Tel: +44(0) 1908 653386
Fax: +44(0) 1908 653858
e-mail: a.goodyear@open.ac.uk
Conference Co-ordinator:
Dawn Stewart
The Institute of Physics
76 Portland Place
London W1B 1NT
Tel: +44 (0)20 7470 4800
Fax: +44 (0)20 7470 4900
e-mail: dawn.stewart@iop.org
Registration details will follow shortly
^ To the top ^